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Intelligent Defect Detection Soft Platform – Based on E-beam Inspection Technology

Production Information
In the semiconductor manufacturing processes, how to enhance the capability & efficiency of wafer defect inspection and then to increase total production yield rate should be the number one issue for all wafer manufacturers in the world.

Based on E-beam inspection technology, we are proud to provide you with a series of well proven and advanced solutions to help you get the most of your existing  inspection equipment.

To meet the trend of industry 4.0 and smart manufacturing, our solutions are perfect for all advanced wafer manufacturing processes.(e.g. 40nm, 28nm, 16nm, 14nm, 10nm, 7nm processes) 。

For further details, you are vary welcome to contact us at:
support@aoelab.com.tw